HOME > Product & Tech > WET > Spin Scrubber Wafer Count Up Start & Wafer Check
It prevents the wafer in the cassette and the IH arm from being broken due to the operator mistakenly unloading the cassette while the SSW980A process is still in progress, and not completed.
- It prevents the wafer in the cassette and the IH arm from being broken due to the operator mistakenly unloading the cassette while the SSW980A process is still in progress, and not completed.
