| |
| 2000 |
 PC |
| - 6m 7L DNS GUI Development |
| PLC Modify |
| - 9L KDNS Scheduler Development |
| Wet Tool Modify |
| - 6,7L IPA sub supply Unit Development |
| - 5L Bath Modify H2SO4 to SC1 |
| - 6L Bath Modify SC1 to H2SO4 |
| Relocation Wet Tool |
| - Mercury Tool Relocation (6L to 9L) |
|
|
| 2001 |
| PC |
| - SES PC Upgrade Modify 6,7,8L 53Tools |
| PLC Modify |
| - 7L KDNS Scheduler Development |
| Wet Tool Modify |
| - 6,7L Digital flow control system Modify(14T) |
| - 6,7L Sub Sink Leak Repair Modify(10T) |
| - SAS L Bath Modify HNO3 to H2SO4 |
| - 6,7L BOE Concentration Monitor Modify |
| - 8L Oxide Tool to Organic Strip Modify |
| Relocation Wet Tool |
| - KDNS Tool Relocation 6L to 8L |
| - Mercury Tool Relocation(6L to 9L) |
| Dryer Interface Modify |
| - 6,7L IPA Dryer to FST Dryer Modify(3T) |
|
|
| 2002 |
| PC |
| - SAS SES Tool PC Upgrade Modify(12T) |
| PLC Modify |
| - SAS KDNS Scheduler Development(9T) |
| - 8L KDNS Scheduler Development(10T) |
| Wet Equipment Modify |
| - SAS Inline Heater Modify (H3PO4,H2SO4) |
| - 6,7L Sub Sink Leak Repair Modify (7T) |
| - 6L KDNS Tool Half Auto Modify |
| - 8L C/W to Rinse Modify (3T) |
| Dryer Interface Modify |
| - SAS S/D to IPA Dryer Modify
|
|
|
| 2003 |
| PLC Modify |
| - 7L KDNS PLC Scheduler Development(4T) |
| Wet Equipment Modify |
| - SAS HF to SC1 Modify (KAIJO Tool) |
| - 6L C/W to Rinse Modify |
| - 6,7L HQDR Leak Repair (Sub Sink 2Tools) |
| - SAS Digital flow control system Modify(9T) |
| Wet Equipment Relocation |
| - SAS SES Tool Relocation (3T) |
| - SAS SEMES Tool Relocation (1Tool) |
| Dryer Interface Modify |
| - 6L IPA Dryer to FST Dryer Modify (2T) |
| - 8L IPA Dryer to FCD Dryer Modify(1T) |
|
|
|
| 2004 |
| PC |
| - RS L SES PC Upgrade Modify (1T) |
| PLC Modify |
| - 7L Agitation Modify (8T) |
| - 8L SEMES Scheduler Modify(2T) |
| Wet Equipment Modify |
| - SAS Inline Heater Modify(H3PO4) |
| - 6,7L HQDR Leak Repair (Sub Sink -5Tools) |
| - 8L C/W to Rinse Modify(2T) |
| - SAS BOE to SOE Modify (1T) |
| - 6,7L Digital flow control system Modify(4T) |
| - SAS SC1 /HF bath Modify (1T) |
| - SAS AL-E to SC1/HQDR Modify (1T) |
| - 7L SC1 to NSC1 Modify (1T) |
| Wet Equipment Relocation |
| - 8L SES Tool Relocation (1Tool) |
| Installation |
| - SAS 8inch Set-Up (New Pegasus) |
| - Samsung 12inch Set-Up (SES BW3000 12T) |
|
|
| 2005 |
| PC |
| - RS L SES PC Upgrade (7T) |
| PLC Modify |
| - 8L LK201 Link Unit Modify (17T) |
| Wet Equipment Modify |
- 6L H3PO4 DIW Digital flow control system
Modify (2T) |
| - 7L Chemical sub supply unit Modify(1T) |
| - 9L SES Tool Circulation flow rate Modify (1T) |
| - 7L SC1 to NSC1 Modify (1T) |
| - 8L HF+OR to SC1+HQDR Modify (1T) |
| Wet Equipment Relocation |
| - 6L SES Tool Relocation (1T) |
| - 8L SES Tool Relocation (5T) |
| - SAS L Tool Relocation (3T) |
| Dryer Interface Modify |
| - 9L APET Dryer Interface Modify (1T) |
| Installation
|
| - Samsung 12inch Set-Up (SES BW300010T) |
|
|
| 2006 |
| PC |
| - 7L SES PC Upgrade Modify (5T) |
| - 5L SEMES Tool PC Scheduler Modify |
- 10L PC Upgrade WinNT to Win2K Vb5.0 to
Vb6.0(5Tool) |
| PLC Modify |
| - 10L SES Scheduler Modify (1T) |
| - 6L SEMES Stocker Robot Modify (1T) |
| Wet Equipment Modify |
| - 9L H2O2 Clean Valve Modify (45Tools |
| - 6L H2SO4 Circulation Modify (1Tool) |
| - RS L H3PO4 HF Flow Control Modify (1T) |
| - 6L C/W to QDR Modify (2T) |
| - 6L HF to SC1 Modify (1T) |
| - 10L M/D Hood Modify (10T) |
| - RS L Carrier Clean Modify (1T) |
| - 9L Aqua Modify (1T) |
| Wet Equipment Relocation |
| - 11L Relocation SES (3T) |
| - SAS L Relocation (2T) |
| Dryer Interface Modify |
| - SAS APET Dryer Interface (1T) |
| - 8L APET Dryer Interface Modify (1T) |
| - 11L PID Dryer Interface Modify (1T) |
| Installation |
| - Samsung 12inch Set-Up (SES BW3000 6T) |
|
|
| 2007 |
| PC |
| - 7L SES PC Upgrade Modify |
| - 5,9L Scheduler PC Upgrade Modify |
| PLC Modify |
| - 8L RT1 Agitation Modify |
| Wet Equipment Modify |
| - 7L Tel Leak Repair |
| - SAS SES Tool Leak Repair Modify (2T) |
| - KAIJO Tool Leak Repair Modify (1T) |
| - 5L HF to NA Bath Modify |
| - 8,9L IPA Dryer DIW flow rate Modify (15T) |
| - 6L SES PC Rack System Modify (3T) |
| - 9L Transformer Modify (2T) |
| - 8L SES SC1 to NSC1 Modify (1T) |
| Wet Equipment Relocation |
| - 10L Mattson Disassembly (2T) |
| - Relocation 11L to 10L(2T) |
| - 11Line to 4Line (4T) |
| - Relocation 11L to SAS L(3T) |
| Dryer Interface Modify |
| - SAS L PID Dryer Interface Modify (1T) |
| Installation
|
| - Samsung 12inch Set-Up (SES BW3000 6T) |
|
|
| |
