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A flow sensor is used for the volumetric supply of the
NH4OH and H202 of the SC1 chemical, and their volumetric feeding
can be differentiated for high/low levels respectively, allowing
efficient concentration adjustment. 

 

It allows the change from the volumetric feeding management, based on the number
of strokes of the volumetric pump to the management of the volume, which is to be
used based on the volumetric feeding per cc.  

It improves the efficiency in managing the concentration for the equipment by eliminating
concentration variations that occur due to the aging of the volumetric pump and it also
allows automatic concentration adjustment.